Title:
PREPARATION OF DIAMOND-LIKE THIN FILM
Document Type and Number:
Japanese Patent JPH0345596
Kind Code:
A
Abstract:
PURPOSE:To obtain a diamond thin film having good diamond characteristics by irradiating a substrate with a HCD(Hollow Cathode Discharge) beam in vacuo and simultaneously feeding a specific gas mixture from an thermally activating nozzle. CONSTITUTION:In a chamber 6 vacuumized by evacuating through a vacuum suction outlet 7 a HCD beam is generated from a HCD gun 1 with electrodes 2 and 3 and an electric magnetic 4 and the high plasma electron flow 5 is irradiated on the surface of a substrate 8 with a permanent magnet 9 disposed behind the substrate 8. Simultaneously, a mixture of H2 gas and at least one gas selected from CH4, CH3 and CH2 is fed into the chamber 6 from an activating plasma nozzle 10 having an electrically heated tip, thereby forming a diamond thin film on the substrate 8.
Inventors:
IGUCHI MASAO
KOBAYASHI YASUHIRO
SUZUKI KAZUHIRO
KOBAYASHI YASUHIRO
SUZUKI KAZUHIRO
Application Number:
JP18038789A
Publication Date:
February 27, 1991
Filing Date:
July 14, 1989
Export Citation:
Assignee:
KAWASAKI STEEL CO
International Classes:
C30B29/04; C23C16/26; C23C16/27; (IPC1-7): C23C16/26; C30B29/04
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