Title:
PROBE CARD AND INSPECTION DEVICE
Document Type and Number:
Japanese Patent JP2011145279
Kind Code:
A
Abstract:
To provide a probe card and an inspection device easy to exchange, position, and assemble probes.
The probe card, which is a probe card including a plurality of pogo pins contacting electrically with each electrode of an inspected body, includes a supporting substrate supporting the each pogo pin, and the supporting substrate concerned includes a strong supporting member positioning and supporting the lower part of the each pogo pin and a sheet-like flexible supporting member supporting an intermediate part of the each pogo pin. While, the inspection device, which is an inspection device including a probe card, utilizes the probe card as the probe card concerned.
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Inventors:
KIYOFUJI HIDEHIRO
TANAKA KENTARO
KATO SHINJI
TANAKA KENTARO
KATO SHINJI
Application Number:
JP2010232441A
Publication Date:
July 28, 2011
Filing Date:
October 15, 2010
Export Citation:
Assignee:
MICRONICS JAPAN CO LTD
International Classes:
G01R1/073; G01R31/26; H01L21/66
Domestic Patent References:
| JP2006153723A | 2006-06-15 | |||
| JP2009162483A | 2009-07-23 | |||
| JPH0650991A | 1994-02-25 |
Attorney, Agent or Firm:
Nobuyuki Kudo
Yusuke Wakabayashi
Yusuke Wakabayashi
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