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Patent Searching and Data


Title:
PROBE CARD
Document Type and Number:
Japanese Patent JPS6286836
Kind Code:
A
Abstract:

PURPOSE: To mount or dismount a probe card from above a prober by directing the direction of the projecting face of a terminal pin on the card in the same direction as the probe forming face.

CONSTITUTION: When a probe card body 1 is inserted into a through hole formed in a repeating member 7 of a prober, and its collar is clamped with a clamping screw 12 to the member 7. At this time, a socket 6 mounted in the upward attitude on the upper end face of the member 7, and a terminal pin 2 provided at the collar of the body 1 opposed to the upper end face of the member 7 are electrically contacted to be connected by an electric circuit with pogocontact pins 8 formed on the member 7 from the socket 6. The pins 8 are connected through a repeating board 9 to a test head 10.


Inventors:
YASUDA TOSHIMI
Application Number:
JP22809285A
Publication Date:
April 21, 1987
Filing Date:
October 14, 1985
Export Citation:
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Assignee:
NEC CORP
International Classes:
G01R1/073; G01R31/26; H01L21/66; (IPC1-7): G01R1/073; G01R31/26; H01L21/66
Attorney, Agent or Firm:
Naka Kanno