PURPOSE: To make possible a measurement of a high-frequency element in the state of a wafer, not only to make possible easily a tuning but also to expand the function of a probe head and to obtain a probe for high-frequency element measurement use capable of expanding the application of an on-wafer probe by a method wherein a matching circuit consisting of transmission lines is inserted in the probe head.

CONSTITUTION: Branch lines 12, 13 and 14 are provided to a main line and the tips of the lines 12, 13 and 14 are grounded via capacitors 15, 16 and 17. These lines are formed so as to form a matching circuit. For example, in the case of a measurement of noise in a low-noise element, the matching circuit is constituted in such a way as to give the optimum noise impedance of the element.