Title:
PROBING HEAD
Document Type and Number:
Japanese Patent JPS5656646
Kind Code:
A
Abstract:
PURPOSE:To secure a contact despite precision being somewhat low for probe positioning and thus to improve working efficiency by forming a probe with leaf spring. CONSTITUTION:The probe 6 is formed with a slender leaf spring with its one end 6a fixed on a head 7 and tip 6b bent in U shape. When the head is moved in the direction indicated by arrow, the probe 6 deforms according to its elasticity to get over a bump 5 and comes in contact with the bump 5 to measurement. Upon finishing measurement for one row, the head 7 is elevated to probe another row. Since the head 7 need not be moved vertically at each contact, working efficiency can be improved.
Inventors:
NAITOU MASAYA
Application Number:
JP13187879A
Publication Date:
May 18, 1981
Filing Date:
October 15, 1979
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01R1/073; H01L21/66; (IPC1-7): H01L21/66