Title:
PROCESS OF MANUFACTURING ORGANIC THIN FILM SOLAR CELL ELEMENT
Document Type and Number:
Japanese Patent JP2014060392
Kind Code:
A
Abstract:
To provide a process of manufacturing an organic thin film solar cell element capable of reducing damage caused by thermal effect and such during laser processing and enabling continuous mass production.
Concerning a laser used in a laser processing step in which at least one of a bottom electrode, an upper electrode, and an active layer is processed by using a laser, a laser wavelength is made to be single, a beam shape is made to be rectangular, and energy distribution is made to be flat.
Inventors:
UCHIDA KENTARO
Application Number:
JP2013172741A
Publication Date:
April 03, 2014
Filing Date:
August 22, 2013
Export Citation:
Assignee:
MITSUBISHI CHEM CORP
International Classes:
H01L51/42; B23K26/00; B23K26/06; B23K26/364
Domestic Patent References:
| JP2011100923A | 2011-05-19 | |||
| JPS6240986A | 1987-02-21 | |||
| JP2010232510A | 2010-10-14 | |||
| JPH1027918A | 1998-01-27 | |||
| JP2010287800A | 2010-12-24 |
Foreign References:
| US20090213446A1 | 2009-08-27 |
Attorney, Agent or Firm:
Yoshiyuki Kawaguchi
Daisuke Takada
Shinichi Sanuki
Takeshi Niwa
Kaoru Kosaka
Toshiaki Shimoda
Daisuke Takada
Shinichi Sanuki
Takeshi Niwa
Kaoru Kosaka
Toshiaki Shimoda