Title:
微細機械加工素子のアレイを含むデバイスを設計及び製造するためのプロセス、そのようなプロセスの最後に得られるデバイス
Document Type and Number:
Japanese Patent JP7215802
Kind Code:
B2
Abstract:
A design process is used for designing a device comprising a plurality of micro-machined elements, each comprising a flexible membrane, the elements being arranged in a plane in a determined topology. The design process comprises a step of defining the determined topology so that it has a character compatible with a generic substrate having cavities, the characteristics of which are pre-established. Each flexible membrane of the micro-machined elements is associated with one cavity of the generic substrate. The present disclosure also relates to a fabrication process for fabricating a device comprising a plurality of micro-machined elements, and to this device itself, wherein only some of the pairs of cavities and flexible membranes are configured to form a set of functional micro-machined elements.
Inventors:
Gislen, Bruno
Application Number:
JP2020535609A
Publication Date:
January 31, 2023
Filing Date:
January 18, 2019
Export Citation:
Assignee:
Soitec
International Classes:
G02B26/00; B81C1/00; H04R17/00; H04R19/00
Domestic Patent References:
| JP2011044757A | ||||
| JP2006343315A | ||||
| JP2010172181A | ||||
| JP2017216728A | ||||
| JP2004025321A |
Foreign References:
| US20170328870 | ||||
| US20190290243 | ||||
| US20170326591 | ||||
| US20180243792 | ||||
| US20160051225 | ||||
| WO2006129525A1 |
Attorney, Agent or Firm:
Ikeda Adult
Junichiro Sakamaki
Masakazu Noda
Junichiro Sakamaki
Masakazu Noda
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