Title:
PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2009302482
Kind Code:
A
Abstract:
To provide a processing device that reduces flexure of a straightening wall disposed around a workpiece.
In the processing device 2 for carrying out, for example, etching of the workpiece S disposed on a placement table 3 by supplying a processing gas into a processing chamber 20, a straightening member 5 connects a plurality of the straightening walls 51 extending along each side of the workpiece S so that the workpiece S is enclosed. Both end portions of each straightening wall 51 are supported by a supporting member 52, and the upper limb thereof is gradually formed high in a direction of a center of the straightening wall 51 while a lower limb thereof is formed parallel to an upper surface of the placement table.
Inventors:
MINAMI MASAHITO
SASAKI YOSHIHIKO
SASAKI YOSHIHIKO
Application Number:
JP2008158390A
Publication Date:
December 24, 2009
Filing Date:
June 17, 2008
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/3065; C23C16/455; H01L21/285; B65G49/06; H01L21/683
Domestic Patent References:
JP2003243364A | 2003-08-29 | |||
JP2007042744A | 2007-02-15 | |||
JP2000315676A | 2000-11-14 |
Attorney, Agent or Firm:
Toshio Inoue
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