Title:
Processing equipment
Document Type and Number:
Japanese Patent JP6363877
Kind Code:
B2
Inventors:
Fujita Hideo
Application Number:
JP2014113839A
Publication Date:
July 25, 2018
Filing Date:
June 02, 2014
Export Citation:
Assignee:
Mizuko Co., Ltd.
International Classes:
B26F1/38; B26D1/40; B26F1/44
Domestic Patent References:
| JP2001038675A | ||||
| JP1097600A | ||||
| JP8052695A |
Foreign References:
| US5058496 |
Attorney, Agent or Firm:
Yamamura Patent Office
Yoshinobu Yamamura
Yoshinobu Yamamura
Previous Patent: A substrate treating method and a substrate processing device
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