自己診断機能を備える加工装置

Title:

自己診断機能を備える加工装置

Document Type and Number:

Japanese Patent JP7246827

Kind Code:

B2

Abstract:

The present invention provides a processing apparatus capable of self-diagnosing whether there is a change of each component. The processing apparatus comprises: a holding table to hold a workpiece; and a self-diagnosis unit to diagnose the state of the processing apparatus in a state where processing by a processing unit is not performed. The self-diagnosis unit includes: a vibration source to give vibration in a prescribed range of frequency to the processing apparatus; a vibration sensor to observe vibration that is generated by the vibration source and spreads through the processing apparatus to acquire a vibration waveform; a natural frequency recording part to record a frequency at which resonance is created in each component of the processing apparatus as a natural frequency; a frequency characteristic storage part to accumulate frequency characteristics of the vibration calculated from the vibration waveform acquired by the vibration sensor; and a determination part to determine a change in a component, to which a vibration peak included in the frequency characteristics of the vibration belongs, if the difference between the frequency of the vibration peak and the natural frequency of the component, to which the vibration peak belongs, exceeds a prescribed range.

Inventors:

Kubo Masahiro
Satoshi Takahashi

Application Number:

JP2018244899A

Publication Date:

March 28, 2023

Filing Date:

December 27, 2018

Export Citation:

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