Title:
PROCESSING METHOD
Document Type and Number:
Japanese Patent JP2023104699
Kind Code:
A
Abstract:
To provide a processing method that can safely process a mixture containing one or both of halosilanes and hydrolysates of halosilanes.SOLUTION: A processing method for processing a mixture containing one or both of halosilanes and hydrolysates of halosilanes includes a step of bringing a process liquid having a pH of 8 or more and 14 or less and a mass equivalent to 100 times or more based on the mass of the mixture into contact with the mixture.SELECTED DRAWING: Figure 4
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Inventors:
UCHIDA KENYA
FUKUI HIROYUKI
IWAMOTO TAKEAKI
FUKUI HIROYUKI
IWAMOTO TAKEAKI
Application Number:
JP2022005848A
Publication Date:
July 28, 2023
Filing Date:
January 18, 2022
Export Citation:
Assignee:
TOSHIBA CORP
KIOXIA CORP
UNIV TOHOKU
KIOXIA CORP
UNIV TOHOKU
International Classes:
C23C16/44; C23C16/24; H01L21/205
Attorney, Agent or Firm:
Patent Attorney Corporation Suzue Patent General Office
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