Title:
PRODUCING METHOD OF SILVER NANO-STRUCTURE BY SCANNING TUNNELING MICROSCOPE
Document Type and Number:
Japanese Patent JP2004114273
Kind Code:
A
Abstract:
To easily produce a silver nano-structure that has high electric conductivity and is optimal as an electrode material at an arbitrary position on a semiconductor substrate.
A product made of silver or a product of which surface is coated with silver thin film is used as a probe of a scanning tunneling microscope. A voltage pulse is applied to this probe to feed the silver from the probe onto the surface of the semiconductor substrate at a nano meter scale.
Inventors:
FUJITA DAISUKE
Application Number:
JP2002284620A
Publication Date:
April 15, 2004
Filing Date:
September 30, 2002
Export Citation:
Assignee:
NAT INST FOR MATERIALS SCIENCE
International Classes:
B82B3/00; B82Y40/00; H01L21/285; G01Q60/16; H01L21/768; (IPC1-7): B82B3/00; H01L21/285
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