Title:
PRODUCTION OF ALUMINA CERAMICS EXCELLENT IN PLASMA RESISTANCE
Document Type and Number:
Japanese Patent JPH11246263
Kind Code:
A
Abstract:
To produce alumina ceramics exhibiting superior plasma resistance in a process for producing a semiconductor, a liq. crystal display or the like by a general sintering method without adopting a special method such as a single crystal pulling method.
When alumina powder is compacted and sintered to produce alumina ceramics, sintering is carried out in a nitrogen-contg. inert atmosphere. The partial pressure of nitrogen in the inert atmosphere is desirably ≥0.5 atm and the sintering temp. is preferably 1,400-1,900°C.
Inventors:
KANAMARU MORIYOSHI
HISAMOTO ATSUSHI
NAGAHAMA MUTSUHISA
SUGIYAMA NARIMASA
HISAMOTO ATSUSHI
NAGAHAMA MUTSUHISA
SUGIYAMA NARIMASA
Application Number:
JP5497698A
Publication Date:
September 14, 1999
Filing Date:
March 06, 1998
Export Citation:
Assignee:
KOBE STEEL LTD
SHINKO KOBELCO TOOL KK
SHINKO KOBELCO TOOL KK
International Classes:
C04B35/10; (IPC1-7): C04B35/10
Attorney, Agent or Firm:
Etsushi Kotani (1 person outside)