To provide a method for producing a compound membrane by which the compound membrane having a prescribed composition ratio and good crystallinity can be stably produced.

A substrate 100 is placed in a reaction room 1, and heated to a prescribed temperature. A TlBaCaCuO membrane is grown on the substrate 100 by supplying Tl, Ba, Ca, Cu and O from a Tl-evaporating source 7 and a target 5 to the substrate 100. The TlBaCaCuO membrane is crystallized whenever every block having a laminar structure is formed. The evaporating amount of the Tl by heating is large in a incomplete block under construction and thereby the evaporating amount of the Tl is changed according to the proportion of the uncrystallized region on the surface. The evaporating amount of the Tl by the heating is small in the complete block after construction and nearly constant. The membrane growth is stopped for a constant period whenever each of the blocks is formed and the charging amount of the Tl is regulated according to the forming process of the block.