PRODUCTION OF ELECTRICALLY CONDUCTIVE HIGH-DENSITY TITANIUM OXIDE TARGET

Title:

PRODUCTION OF ELECTRICALLY CONDUCTIVE HIGH-DENSITY TITANIUM OXIDE TARGET

Document Type and Number:

Japanese Patent JPH11172423

Kind Code:

A

Abstract:

To produce an electrically conductive high-density titanium oxide target for forming titanium oxide thin film.

In this method for producing the electrically conductive high density titanium oxide target by subjecting titanium oxide raw material powder to sintering or hot pressing in a nonoxidizing atmosphere, mixed powder obtd. by blending titanium dioxide powder having an anatase type structure (hereinafter refered to as anatase type powder) and titanium dioxide powder having a rutile crystal structure (hereinafter refered to as rutile type powder) in the radio of 0.01≤ (anatase type powder)/(anatase type powder + rutile type powder) ≤1 and mixing them is used as the titanium oxide raw material powder.

Inventors:

WATANABE KAZUO
MISHIMA TERUSHI
MARUYAMA HITOSHI

Application Number:

JP33975197A

Publication Date:

June 29, 1999

Filing Date:

December 10, 1997

Export Citation:

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Assignee:

MITSUBISHI MATERIALS CORP

International Classes:

C04B35/46; C23C14/08; C23C14/34; (IPC1-7): C23C14/34; C04B35/46; C23C14/08

Attorney, Agent or Firm:

Kazuo Tomita (1 person outside)

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