PURPOSE: To prevent generation of materials causing drop-out by previously melting a magnetic metallic material in a melting furnace, then supplying this molten magnetic metallic material into a crucible for vapor deposition.
CONSTITUTION: A raw material supplying device 11 for charging the ferromagnetic metallic material of a raw material into the melting furnace 12 is disposed above the melting furnace 12. The ferromagnetic metallic material 7 in a solid state is properly supplied from the raw material supplying device 11 into the melting furnace 12 when the ferromagnetic metallic material 7 in the crucible 6 lacks during the vapor deposition. In such a case, the raw material is previously melted in the melting furnace 12 and thereafter the molten ferromagnetic metallic material 7 is supplied into the crucible 6 in the case of supplying the ferromagnetic metallic material 7 of the raw material during the vapor deposition and, therefore, the direct vapor deposition of the evaporated matter, such as gases, generated from impurities onto a base film 2 does not arise and the generation of the materials to be the cause for the drop-out is prevented.
SUZUKI TAIZO
SATO TAKETOSHI
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