PURPOSE: To form a dense and uniform composite metal oxide film at a high speed by discretely controlling conditions, such as evaporation temp., of raw material metals, flow rate of gases and temp. for mixing with reactive gases.
CONSTITUTION: Raw materials 4, 10 are put into boats 3, 9 and are evaporated by heating to about 130 to 200°C by heaters 7, 11. The evaporated raw materials are transported up to a mixing section S2 where the vapors are mixed with the reactive gases contg. O2. The atmosphere temp. of the mixing section S2 is controlled to about 150 to 200°C to prevent the recrystallization of the evaporated metals and the nucleous formation by a vapor reaction. The sufficiently mixed gases are introduced to a reaction section S3 where the atmosphere is heated to about 500 to 1000°C by a heater 13 to generate a decomposition and oxidation reaction and to form the nuclei on a substrate 14. The crystals are grown with the nuclei as base points. The composite oxide film 14a of the metals is thus formed.
AIZAWA MASANOBU
HIRAI TOSHIO
YAMANE HISANORI
