PRODUCTION OF OPTICAL INTEGRATED CIRCUIT

Title:

PRODUCTION OF OPTICAL INTEGRATED CIRCUIT

Document Type and Number:

Japanese Patent JP2000039533

Kind Code:

A

Abstract:

To obtain an optical integrated circuit which has two type wave guides to be butt joined while preventing the manufacture of excessively grown parts by previously regulating the imprint of these wave guides by using a first mask and continuously producing the strips of the wave guides.

Zones 20, 31 corresponding to active and passive component parts are first respectively formed on a substrate 5. Next, the first mask 100 used for regulating the imprint of the wave guide strips of a BRS type and a ridge type to be etched is formed on the passive zone 31 and the active zone 20. After the imprint of the wave guides is obtd. by the first mask 100, the wave guide strips of the BRS type and the ridge type are continuously etched. The first mask 100 is previously positioned on the zone 31 for the passive component parts in order to manufacture the imprint of the ridge wave guides to be etched.

Inventors:

POMMEREAU FREDERIC
PAGNOD ROSSIAUX PHILIPPE
RENAUD MONIQUE
MARTIN BERNARD
MESTRIC ROLAND

Application Number:

JP19102599A

Publication Date:

February 08, 2000

Filing Date:

July 05, 1999

Export Citation:

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Assignee:

CIT ALCATEL

International Classes:

G02B6/12; G02B6/122; G02B6/136; G02B6/13; G02B6/34; (IPC1-7): G02B6/13; G02B6/122

Attorney, Agent or Firm:

Yoshio Kawaguchi (2 outside)

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