PURPOSE: To produce the pellet for In-Sn oxide vapor deposition having an excellent vaporization characteristic at a low cost by forming the fine-particle of tin-contg. indium oxide obtained by coprecipitation and then calcining the formed product under a specified condition in vacuum.
CONSTITUTION: The pellet of In-Sn oxide(ITO) for vapor deposition is heated in vacuum, vaporized and deposited on a substrate to form the film of ITO. When the pellet is produced, a mixed powder of In2O3 and 5wt.% of the SnO2 obtained by coprecipitation and having ≤0.1μm particle diameter is press-formed in the metallic mold into a pellet. The pellet is calcined at 1000-1400°C in a vacuum at ≤1Torr for ≥ about 30min to produce the pellet for ITO vapor deposition. By this method, a pellet or ITO vapor deposition having excellent vaporization characteristic and capable of vapor-depositing the film in good yield is produced at a low cost.
SUZUKI MASARU
TAKAMIYA NAOKI
ISHIZUKA YOSHIHIKO
