Title:
PRODUCTION OF POLYIMIDE OPTICAL WAVEGUIDE
Document Type and Number:
Japanese Patent JPH05164929
Kind Code:
A
Abstract:
PURPOSE:To obtain a polyimide core layer which is precisely controlled in film thickness by producing the core layer by a vapor deposition polymn. method and using the dry method for production which can be matched with other production processes. CONSTITUTION:A vacuum vapor deposition polymn. device is used. Namely, the temps. of an effusion cell 1 provided with an evaporating source for a polyimide monomer and a substrate 4 are controlled while the vapor deposition rate is monitored by a film thickness monitor 6 to regulate the temps. so as to attain the preset values optimum for producing the polyimide. The growth is started by opening shutters 2, 5. The monomer reacts on the substrate 4 to form the polyimide. The unreacted monomer reevaporates. The thickness of the grown film is monitored by the film thickness monitor 6. The shutters 2, 5 are closed to stop the growth when the desired film thickness is attained. Then, the polyimide thin film precisely controlled in the thickness is obtd. by the dry method which can be executed in a vacuum.
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Inventors:
MARUO YOKO
SASAKI SHIGEKUNI
MATSUURA TORU
ANDO SHINJI
SASAKI SHIGEKUNI
MATSUURA TORU
ANDO SHINJI
Application Number:
JP35285991A
Publication Date:
June 29, 1993
Filing Date:
December 17, 1991
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
G02B6/13; G02B6/12; (IPC1-7): G02B6/12
Attorney, Agent or Firm:
Hiroshi Nakamoto (2 outside)
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