PURPOSE: To obtain metallic powder having high purity and uniform grain size by forming metallic particles by vacuum evaporation on the film of a sublimatable material formed preliminarily on the surface of a substrate for vapor deposition then sublimating the sublimatable material.

CONSTITUTION: The surface of a discoid substrate 3 is cooled to a low temp. by a coolant of liquid N2 or the like supplied from the hollow part of a revolving shaft 2. For example, gaseous CO2 is sprayed toward the bottom surface of the substrate 3 from a supplying device 4 having many spray nozzles in the coating region A of a sublimatable material. The gaseous CO2 is solidified on the surface of the substrate 3 to form the film of dry ice. The substrate 3 having such film is rotated and is fed to a vapor deposition region B where the vapor deposition of a desired metal is accomplished by a vacuum device 5. The substrate 3 is further rotated and is fed to a region C for recovering the pulverous metallic powder where the sublimatable material and metallic powder on the surface of the substrate 3 are recovered into a capturing funnel 6 by a spatula, etc. and are recovered as a product through a discharging port 7. The pulverous metallic powder having a grain size of particularly 100W300 or below and having high quality is thus obtd.