Title:
PRODUCTION OF QUARTZ GLASS BLANK AND DEVICE SUITABLE THEREFOR
Document Type and Number:
Japanese Patent JP3668862
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a relatively compact quartz glass blank capable of omitting the installation of an ultrasonic atomizer.
SOLUTION: Liq. glass stock is fed into the spray nozzle of a multi-nozzle evaporation burner, it is atomized or gasified in the burner and mixed with oxygen-contg. gas to form SiO2 particles by chemical reaction and the SiO2 particles are deposited on a substrate. The resultant porous preform is sintered to produce the objective quartz glass blank. In order to atomize or gasify the glass stock, the atomizing gas is fed into the burner and a negative pressure is generated in the region of the opening of the spray nozzle.
Inventors:
Claus Ruppert
Anton Steincor
Anton Steincor
Application Number:
JP16878398A
Publication Date:
July 06, 2005
Filing Date:
June 16, 1998
Export Citation:
Assignee:
Shin-Etsu Quartz Products Co., Ltd.
International Classes:
C03B8/04; C03B19/14; C03B20/00; (IPC1-7): C03B8/04; C03B20/00
Domestic Patent References:
| JP58213693A | ||||
| JP55120732U |
Foreign References:
| US5110335 |
Attorney, Agent or Firm:
Michiteru Soga
Michiharu Soga
Yutaka Ikeya
Hidetoshi Furukawa
Suzuki Kenchi
Masahisa Hase
Koji Fukui
Michiharu Soga
Yutaka Ikeya
Hidetoshi Furukawa
Suzuki Kenchi
Masahisa Hase
Koji Fukui