PRODUCTION OF SYNTHETIC QUARTZ GLASS CRUCIBLE

Title:

PRODUCTION OF SYNTHETIC QUARTZ GLASS CRUCIBLE

Document Type and Number:

Japanese Patent JPH0524970

Kind Code:

A

Abstract:

PURPOSE:To provide a method for manufacturing a synthetic quartz glass crucible of quality for pulling up silicon single crystals for semiconductor device free from the generation of defective foams. CONSTITUTION:The subject method for manufacturing a synthetic quartz glass crucible has a feature that, in the method for manufacturing a synthetic quartz glass crucible obtd. by fusing and forming synthetic quartz glass powder, the above synthetic quartz glass powder is constituted of amorphous silica powder in which the one with <=100 meshes particle size is regulated to <=1wt.%.

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Inventors:

WATABE HIROYUKI
TAKITA MASATOSHI

Application Number:

JP20390291A

Publication Date:

February 02, 1993

Filing Date:

July 18, 1991

Export Citation:

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Assignee:

SHINETSU CHEMICAL CO

International Classes:

C03B20/00; C03B19/09; C03B19/10; C30B15/10; (IPC1-7): C03B20/00; C30B15/10

Attorney, Agent or Firm:

Ryoichi Yamamoto (1 person outside)

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