Title:
PRODUCTION OF THIN FILM MAGNETIC HEAD
Document Type and Number:
Japanese Patent JPH07121838
Kind Code:
A
Abstract:
PURPOSE: To obtain a production method of a thin film magnetic head by which warpage of the substrate caused in the step of flattening a protective layer is decreased and magnetic characteristics of a magnetic head element are improved.
CONSTITUTION: In the step of polishing the upper surface of plural numbers of protective layers 14, after the upper surface of the protective layers 14 are partially polished, the magnetic head substrate 11 with the protective layers is once removed from the substrate sticking tool 15. Then the magnetic head substrate 11 with the protective layers is mounted on the substrate sticking tool 15 and the upper surface of the protective layers 14 is again polished.
Inventors:
TSUJII HIROYUKI
Application Number:
JP27151193A
Publication Date:
May 12, 1995
Filing Date:
October 29, 1993
Export Citation:
Assignee:
SHARP KK
International Classes:
B24B19/26; G11B5/31; G11B5/33; G11B5/39; (IPC1-7): G11B5/39; B24B19/26; G11B5/31; G11B5/33
Attorney, Agent or Firm:
Umeda Masaru