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Title:
PRODUCTION OF THIN FILM SOLAR CELL
Document Type and Number:
Japanese Patent JPH07254723
Kind Code:
A
Abstract:

PURPOSE: To thermally treat a film containing elements of groups 1B, 3B and 6B without using a gas consisting of group 6B simple body or compound, to produce a thin film solar cell thereby.

CONSTITUTION: An Mo film 2 is formed on a glass substrate 1. A Cu film 3 and an In film 4 are successively formed thereon by deposition, sputtering, plating, etc. An Se powder is sprinkled over the film 4 to form an Se powder layer 7. Then the sample is subjected to heat treatment in a vacuum or in an inert gas such as Ar, at 200-250°C for about 30-60 minutes, and further they are kept at 400-450°C for about 2-4 hours so as to alloy them and form them into a CuInSe2 ternary alloy film 8. Finally, a CdS film 9 and a transparent electrode film 10 are formed thereon.


Inventors:
IKETANI TAKESHI
SATO KENJI
TAKADA KAZUHIRO
Application Number:
JP4573094A
Publication Date:
October 03, 1995
Filing Date:
March 16, 1994
Export Citation:
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Assignee:
YAZAKI CORP
International Classes:
G02F1/1343; C23C14/06; H01L21/203; H01L21/324; H01L31/04; (IPC1-7): H01L31/04; C23C14/06; G02F1/1343; H01L21/203; H01L21/324
Domestic Patent References:
JPH05275331A1993-10-22
JPH05263219A1993-10-12
JPH04212430A1992-08-04
JPH04277682A1992-10-02
JPH0513795A1993-01-22
JPH0563225A1993-03-12
Attorney, Agent or Firm:
Hideo Takino (1 outside)



 
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