PURPOSE: To readily obtain homogeneous ultrafine nitride particles having an uniform particle diameter at a low cost, by introducing a specific reaction gas into a hermetically sealed vacuum space equipped with an evaporation source consisting of a metal or ceramics, irradiating the evaporation source with laser beams, quenching and solidifying the emitted vapor.
CONSTITUTION: An evaporation source 1, e.g. Si or Ti, consisting of metal or ceramics is held by an evaporation source holding device 2 in a hermetically sealable vacuum tank 3 and the interior of the vacuum tank 3 is then evacuated to a vacuum under ≤1×10-4Torr with an evacuation device 8 and hermetically sealed. A reaction gas consisting of one or more of N2, NH3 and NO2 and, as necessary, an inert gas, e.g. Ar, etc., are introduced from a reaction gas feed inlet 5 and set at a given pressure. Laser beams 10, e.g. obtained by condensing CO2 laser at 10.6μ wavelength, are then led through a beam transmitting window 4 to irradiate and evaporate the evaporation source 1. The resultant emitted vapor is then quenched and solidified in the reaction gas atmosphere to produce ultrafine nitride particles, which are then passed through a vent port 6 to flow in a vent pipe 7. The resultant ultrafine particles are collected and recovered by an ultrafine particle recovering device 9.
ONO MORIAKI
KOSUGE SHIGECHIKA
WATANABE ITARU
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