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Title:
PROTECTION TUBE FOR THERMOCOUPLE, AND TEMPERATURE MEASURING INSTRUMENT USING THE SAME
Document Type and Number:
Japanese Patent JP2005106512
Kind Code:
A
Abstract:

To provide a protection tube for a thermocouple capable of maintaining air-tight sealability for a connection part even when carrying out 1100°C or more of high-temperature heat treatment in a horizontal furnace using a heat-treating tube, and a temperature measuring instrument using the same.

In this protection tube for the thermocouple provided at least with an insertion part inserted into the heat-treating tube equipped to the horizontal furnace, and the connection part for air-tight connection to the heat-treating tube via a sealant, at least the connection part comprises quartz, and the insertion part comprises a material having heat resistance higher than that of quartz, and the temperature measuring instrument using the protection tube is also provided.


Inventors:
KIMURA AKIHIRO
KOBAYASHI HIROYUKI
Application Number:
JP2003337486A
Publication Date:
April 21, 2005
Filing Date:
September 29, 2003
Export Citation:
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Assignee:
SHINETSU HANDOTAI KK
International Classes:
G01K1/08; H01L21/22; (IPC1-7): G01K1/08; H01L21/22
Attorney, Agent or Firm:
Mikio Yoshimiya