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Title:
PROXIMITY FIELD SCANNING TYPE MICROSCOPE AND SAMPLE STAGE THEREFOR
Document Type and Number:
Japanese Patent JPH06175029
Kind Code:
A
Abstract:

PURPOSE: To easily and inexpensively provide the mass production of a sample stage for approximity field scanning type microscope and to use the sample stage in a general optical microscope.

CONSTITUTION: In the sample stage 11 for proximity field scanning type microscope 11 and an proximity field scanning type microscope using such sample stage which introduce illumination light so as to satisfy a total reflection condition on the back plane of a sample, and detect an evanescent wave generated on the surface of the sample at that time via a probe provided with an aperture smaller than the wavelength of the illumination light essentially and capable of scanning the sample relatively, and place the sample on the proximity field scanning type microscope to obtain an image on the surface of the sample, the sample stage 11 is constituted of a parallel plane shape member 1 consisting of a light transmissible material, and is equipped with an illumination light introduction part 3 formed in an oblique plane for a plane on which the sample is placed at an edge at least on one side.


Inventors:
OSAWA HISAO
KONUKI TETSUJI
Application Number:
JP35072392A
Publication Date:
June 24, 1994
Filing Date:
December 04, 1992
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G02B21/00; G01Q30/08; G01Q30/20; G01Q60/18; (IPC1-7): G02B21/00
Attorney, Agent or Firm:
Yoshiaki Ikeuchi