Title:
PURGE DEVICE, PURGE STOCKER, AND CONTAINER
Document Type and Number:
Japanese Patent JP2015142104
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a purge device which effectively exhausts a gas in a container without adding a space in a height direction, and to provide a purge stocker and a container.SOLUTION: A purge device 1 includes an exhaust passage 30 which introduces a predetermined gas into a storage container 50 having a side flange 50f and guides the gas exhausted from the storage container 50. The exhaust passage 30 is disposed in a space K provided at a level LV (a height position) between a placement base 60 on which the storage container 50 is placed and the side flange 50f of the storage container 50 placed on the placement base 60.
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Inventors:
MURATA MASANAO
Application Number:
JP2014015724A
Publication Date:
August 03, 2015
Filing Date:
January 30, 2014
Export Citation:
Assignee:
MURATA MACHINERY LTD
International Classes:
H01L21/673; B65G1/00
Attorney, Agent or Firm:
Kazuya Nishi
Tomihiko Isono
Tomihiko Isono