To purify a metal alkoxide by bringing it into contact with a metal carbonate followed by conducting a distillation to diminish the amount of the elemental chlorine contained therein so as not to interfere with relevant device(s) in CVD film formation.
(A) A metal alkoxide, pref. an alkoxide of a group IVa, group Va or group Vb metal (e.g. anhydrous zirconium chloride) is brought into contact with (B) a metal carbonate, pref. alkali metal carbonate, alkaline earth metal carbonate or another metal carbonate (e.g. silver carbonate) followed by conducting a distillation. In this case, the amount of the component B to be used is, for example, about 5-50 molar times the chlorine content in the component A, and it is preferable that a mixture of the components A and B be held at 20-100°C for about 1-10h.
UZAWA HIROSHI
HAYASHIDA KAZUYOSHI
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