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Patent Searching and Data


Title:
PYROLYTIC BORON NITRIDE SHEET AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JPH03183604
Kind Code:
A
Abstract:

PURPOSE: To obtain the high-strength and high-elasticity sheet excellent in workability at the time of obtaining a pyrolytic boron nitride film by a chemical vapor-phase reaction by specifying the film forming temp., film forming rate and crystal structure.

CONSTITUTION: A gaseous boron halide is allowed to react with gaseous ammonia at ≥1800°C and at the film forming rate of ≤20μ/hr by CVD method to deposit a pyrolytic boron nitride (p-BN) film on a substrate, and then the film is separated from the substrate. A sheet with the Young's modulus of the BM layer controlled to ≤ 5 GPa and its thickness to 10-300μ and consisting of a mixed layer of hexagonal boron nitride (h-BN) and a turbulent-structure boron nitride (t-BN) having the interplanar spacing of C faces larger than that of h-BN or a mixed layer of two kinds of t-BN having different interplanar spacings of C faces is obtained by this method.


Inventors:
OGAWA TAKASHI
Application Number:
JP32154389A
Publication Date:
August 09, 1991
Filing Date:
December 13, 1989
Export Citation:
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Assignee:
SUMITOMO METAL MINING CO
International Classes:
C01B21/064; C23C16/34; (IPC1-7): C01B21/064; C23C16/34