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Title:
RADIATION DETECTOR
Document Type and Number:
Japanese Patent JP2008215951
Kind Code:
A
Abstract:

To provide an indirect system radiation detector capable of preventing moisture infiltration into a scintillator layer, suppressing deterioration of the scintillator layer in an acceleration test under high-temperature high-humidity conditions, and radiating efficiently visible light generated in the scintillator layer to a photoelectric conversion element.

This detector is equipped with an electrode substrate having a transparent substrate; a plurality of thin film transistors and a plurality of storage capacitors provided on the transparent substrate; an insulating layer formed on the transparent substrate, including the thin film transistors and the storage capacitors; and a plurality of photoelectric conversion elements connected, respectively to each thin film transistor, for converting visible light into an electrical signal; the scintillator layer formed on the electrode substrate, for converting a radiation into visible light; and a protective layer, having a reflecting film layer formed at least on the scintillator layer and including titanium oxide powder 70 wt.% or higher in a thermoplastic polymer compound; an adhering layer formed on the electrode substrate surface including the reflecting film layer; and a moisture-proof layer adhering to the adhering layer, whose moisture permeability at 40C and 90RH is 0.5 g/m2/day or lower.


Inventors:
FUJIEDA SHINETSU
WATARIDO HIROKO
MOTOMIYA AKINORI
Application Number:
JP2007051793A
Publication Date:
September 18, 2008
Filing Date:
March 01, 2007
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
G01T1/20; H01L31/10
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto