Title:
感放射線性樹脂組成物、表示素子の層間絶縁膜、保護膜及びスペーサーならびにそれらの形成方法
Document Type and Number:
Japanese Patent JP5505066
Kind Code:
B2
Inventors:
Eiji Yoneda
Nobuhiro Nishi
Seiichiro Kodama
Katsumi Inomata
Nobuhiro Nishi
Seiichiro Kodama
Katsumi Inomata
Application Number:
JP2010104583A
Publication Date:
May 28, 2014
Filing Date:
April 28, 2010
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/004; G02F1/1339; G03F7/031; G03F7/033
Domestic Patent References:
| JP201195715A | ||||
| JP201054632A | ||||
| JP2009258506A | ||||
| JP2009258603A | ||||
| JP2011209681A | ||||
| JP2011209682A | ||||
| JP2011209719A | ||||
| JP2011221494A | ||||
| JP2011227449A |