PURPOSE: To control temperature easily by providing a heating means to control the temperature respectively in a raw material container, a mass flowmeter and pipelines to connect said container and flowmeter and installing a heater to heat the mass flow meter and the gas line for the mass flowmeter in an insulating box.
CONSTITUTION: A raw material container 1, a mass flowmeter 2 and heating means 11W13 to be installed on a pipeline 3 to connect said container and meter and to control temperature respectively are provided in a device to control accurately and stably the vaporization feeding of a liquid or solid material or the like to be used for the manufacture of semiconductor elements, optical fibers or the like. Also, a heater 18 to heat directly a base 17 constituting of a gas flowing line of the mass flowmeter 2 as a heating means for the mass flowmeter 2, is installed and the mass flowmeter 2 and the heater 18 are contained in an insulating box 14. As a result, the device can be made compact, and the temperature control by means of adequate heating control can be carried out. Also, the O point of the mass flowmeter can be adjusted easily.
AIKAWA TSUNEO
ARAI MAYUMI
