Title:
REACTION TUBE FOR SEMICONDUCTOR MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JPH06338457
Kind Code:
A
Abstract:
PURPOSE: To provide a reaction tube applicable to various film forming conditions and various arrangement conditions.
CONSTITUTION: At least a plurality of gas end connection pipes 13, 17 and 18 are provided at the bottom edge of a cylinder 14 which constitutes a reaction tube for a semiconductor device, and prescribed pipes are permitted to be connected to the gas end connection pipes. Piping and a gas supplying pipe are selected according to the types of the wafer films to be formed and are connected to the gas end connection pipes. The connecting position is selected according to the constitution and arrangement of the device.
Inventors:
KAIHATSU HIDEKI
IKEDA KAZUTO
MIYA HIRONOBU
IKEDA KAZUTO
MIYA HIRONOBU
Application Number:
JP14865893A
Publication Date:
December 06, 1994
Filing Date:
May 27, 1993
Export Citation:
Assignee:
KOKUSAI ELECTRIC CO LTD
International Classes:
H01L21/205; (IPC1-7): H01L21/205
Attorney, Agent or Firm:
Miyoshi Shoji
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