Title:
REAGENT FOR DECOMPOSING S2F10 AND DECOMPOSITION METHOD
Document Type and Number:
Japanese Patent JP2000225338
Kind Code:
A
Abstract:
To decompose and remove S2F10 selectively and efficiently from SF6 gas containing S2F10 as an impurity.
In a method for decomposing S2F10, SF6 gas containing S2F10 as an impurity is contacted with a reagent for decomposing S2F10 comprising a carbonaceous solid containing at least one compound selected from the group consisting of alkali metal compounds, alkaline earth metal compounds, and quaternary ammonium compounds.
Inventors:
YUGE SADAYOSHI
TAKASE MASAKI
SEKI FUMITOSHI
TAMADA SHIN
TSUBAKI TORU
TAKASE MASAKI
SEKI FUMITOSHI
TAMADA SHIN
TSUBAKI TORU
Application Number:
JP2548899A
Publication Date:
August 15, 2000
Filing Date:
February 02, 1999
Export Citation:
Assignee:
SHOWA DENKO KK
HITACHI LTD
HITACHI ENG SERVICE
HITACHI LTD
HITACHI ENG SERVICE
International Classes:
A62D3/30; B01J20/06; A62D101/47; A62D101/49; (IPC1-7): B01J20/06; A62D3/00
Attorney, Agent or Firm:
Yaguchi flat
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