To provide an inkjet head which makes the bonding surface of a recording element substrate with a substrate support member minute more than the one formed by a conventional technique without decreasing a sealing reliability, and a manufacturing method.
A projection 8, which is formed in the recording element substrate 2 and bonds with the substrate support member 13, is formed so as to have the same quality as the recording element substrate 2 by continuously etching the recording element substrate 2 with a metal layer 9 as an etching mask. Accordingly, since the projection 8 is formed in the state where the sufficient flatness for assuring the metal welding between the metal layers 9 and 14 is maintained, the inkjet head can be manufactured inexpensively without thickening the bump of the metal layer 9.
TAKEUCHI SOTA
KOMURO HIROKAZU
| JP2008307710A | 2008-12-25 | |||
| JPS55158985A | 1980-12-10 | |||
| JPH11192705A | 1999-07-21 | |||
| JPH0524204A | 1993-02-02 | |||
| JP2008000915A | 2008-01-10 |
Ishibashi Masayuki
Masaaki Ogata
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