Title:
レジスト用樹脂および化学増幅型レジスト組成物
Document Type and Number:
Japanese Patent JP4146972
Kind Code:
B2
Inventors:
Masayuki Fujiwara
Yukiya Wakisaka
Toyama Masayuki
Naoshi Murata
Yukiya Wakisaka
Toyama Masayuki
Naoshi Murata
Application Number:
JP19816199A
Publication Date:
September 10, 2008
Filing Date:
July 12, 1999
Export Citation:
Assignee:
Mitsubishi Rayon Co., Ltd.
International Classes:
G03F7/039; H01L21/027; C08F220/26; C08F220/28
Domestic Patent References:
| JP2000212221A | ||||
| JP11269161A |
Foreign References:
| US5364945 |