Title:
超音波振動接合用共振器及びそれを使用する超音波振動接合装置
Document Type and Number:
Japanese Patent JP4592939
Kind Code:
B2
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Inventors:
Shigeru Sato
Masahiro Nakai
Masahiro Nakai
Application Number:
JP2000376536A
Publication Date:
December 08, 2010
Filing Date:
December 11, 2000
Export Citation:
Assignee:
Artex Co., Ltd.
International Classes:
B06B1/02; H01L21/60; H01L21/607
Domestic Patent References:
| JP11345819A | ||||
| JP10015673A | ||||
| JP9057467A | ||||
| JP2000077481A |
Attorney, Agent or Firm:
Keiko Marubayashi
Junichi Miyazono
Junichi Miyazono