Title:
ROLL CLEANING METHOD, ROLL CLEANING DEVICE, AND ROLL DIE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2016153144
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To surely remove silica remaining in a roll without damaging the roll.SOLUTION: A metal roll cleaning method used for manufacturing an imprint roll die includes the polishing step of polishing the side face 11 of the roll 1 by an abrasive agent including silica 3 as an abrasive, and the fluorine-based gas plasma step of introducing fluorine-based gas including fluorine atoms around the roll 1, and generating plasma by the fluorine-based gas to generate active fluorine gas 87, thereby causing the active fluorine gas 87 to react with the silica 3. Thus, flatness of the roll 1 can be secured.SELECTED DRAWING: Figure 2
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Inventors:
HAYATA HIROSHI
OMORI KENJI
OMORI KENJI
Application Number:
JP2015031178A
Publication Date:
August 25, 2016
Filing Date:
February 20, 2015
Export Citation:
Assignee:
PANASONIC IP MAN CORP
International Classes:
B24B37/34; B08B7/00; B24B37/00
Attorney, Agent or Firm:
Morimoto International Patent Office