Title:
電子顕微鏡用試料保持装置及び電子顕微鏡装置
Document Type and Number:
Japanese Patent JP5699207
Kind Code:
B2
Abstract:
A sample holding apparatus for electron microscope includes: a sample holding assembly including an assembly of three components of an upper diaphragm holding part, a sample holding plate and a lower diaphragm holding part; and a holding part that holds the sample holding assembly replaceably. The sample holding assembly includes a cell defined between a diaphragm of the upper diaphragm holding part and a diaphragm of the lower diaphragm holding part, and a flow channel connected to the cell, in which a sample mounted at a protrusion of the sample holding plate is placed. The diaphragm of the upper diaphragm holding part, the sample and the diaphragm of the lower diaphragm holding part are disposed along an optical axis of an electron beam.
Inventors:
Norie Yaguchi
Akira Watanabe
Onan Yusuke
Akira Watanabe
Onan Yusuke
Application Number:
JP2013512317A
Publication Date:
April 08, 2015
Filing Date:
April 20, 2012
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/20; H01J37/26; H01J37/28
Domestic Patent References:
| JPH06318445A | 1994-11-15 | |||
| JPS63291346A | 1988-11-29 | |||
| JPS607047A | 1985-01-14 | |||
| JP2010061990A | 2010-03-18 | |||
| JP2009215609A | 2009-09-24 | |||
| JP2010527123A | 2010-08-05 | |||
| JPH06318445A | 1994-11-15 | |||
| JPS63291346A | 1988-11-29 | |||
| JPS607047A | 1985-01-14 | |||
| JP2010061990A | 2010-03-18 | |||
| JP2009215609A | 2009-09-24 | |||
| JP2010527123A | 2010-08-05 |
Attorney, Agent or Firm:
Yusuke Hiraki
Sekiya Mitsuo
Toshiaki Watanabe
Sekiya Mitsuo
Toshiaki Watanabe