PURPOSE: To rapidly grasp the sampling condition of a sampling inspection and the validity of inspection work by evaluating the accuracy of the sampling inspection based upon quality information obtained from a field and displaying an alarm in accordance with an evaluated result.

CONSTITUTION: At the time of receiving inspection, the sampling inspection of a lot is executed (step 1) in accordance with a certain sampling condition and the sampling condition is recorded (step 2) in a master computer. In each process after the receiving inspection, a defect generated in the process is reported (step 3) to the master computer. The master computer totalizes (step 4) defects recognized as the misjudgement of sampling inspection out of reported defects and evaluates (step 5) the sampling condition from the statistic misjudgement rate of each sampling condition registered in the step 2 and the result of the misjudgement rate obtained in the step 4. For the sampling condition whose misjudgement result exceeds the statistic misjudgement as the result of evaluation, an alarm is displayed (step 6).