To provide a compact scanner system capable of acquiring XY-positional information without distortion and accurate Z-positional information, and a probe microscope unit using the scanner system.

This scanner system is provided with a scanner 1 provided with a stage 2 movable three-dimensional-directionally, a light source 20, a measuring mirror 24 provided in the stage 2 to reflect illumination light from the light source, a fringe counting system 29 for detecting the light reflected by the measuring mirror 24 and for acquiring displacement amount information along a vertical direction of the stage 2, based on a relative phase change of the detected reflected light, and an angle detecting system 28 for detecting the light reflected by the measuring mirror 24 and for acquiring change information in relative inclination of the measuring mirror 24, based on the detected reflected light.