PURPOSE: To improve the detection efficiency of an electron interference fringe so as to provide a scanning interference electron microscope by which magnetic information of a microregion of a magnetic body sample is observed as a scanning image of high S/N rate in the scanning interference electron microscope.
CONSTITUTION: Biprism 3 is provided between an electron gun 1 and a deflection coil 4 and a convergent electron beam for scanning a sample 7 is divided into two points so that an interference fringe 14 is generated on the electron beams which are transmitted through the sample 7 and stacked each other again. The interference fringe 14 is contracted in the parallel direction or expanded in its perpendicular direction of the interference fringe 14 by, for example, an electron optical warpers 10 composed of a multipolar lens so that the interference fringe 14 part of the electron beam is efficiently radiated in an interference fringe position change detector.
YAJIMA YUSUKE
SUZUKI HIROSHI
KURODA KATSUHIRO
