PURPOSE: To provide the scanning probe microscope equipped with each mechanical approach mechanism which does not allow the quantity of scanning to be changed even if a specimen is changed in thickness.

CONSTITUTION: The scanning probe microscope is provided with a cylindrical piezo-electric body 3 for scanning a specimen 4 which is fixed at its one end, and mounted on a Z stage 22, a probe 5 disposed in such a way as to be faced to the specimen 4, and with mechanical approach mechanisms 22, 22a, 24, 24a, 25, 26 and 27 adjusting the distance between the specimen 4 and the probe 5. It is characterized in that each mechanical approach mechanism is interposed between the cylindrical piezo-electric body 3 and the specimen 4.