Title:
走査透過電子顕微鏡および収差補正方法
Document Type and Number:
Japanese Patent JP6914977
Kind Code:
B2
Abstract:
In a scanning transmission electron microscope, a control unit performs: processing of calculating a first auto-correlation function that is an auto-correlation function of a first scanning transmission electron microscope image; processing of acquiring a first intensity profile along a straight line that passes through a center of the first auto-correlation function; processing of obtaining a position of an inflection point that is closest to the center of the first auto-correlation function in the first intensity profile and adopting an intensity at the position as a first reference intensity; processing of obtaining an aberration coefficient by fitting a first aberration function to an isointensity line that connects positions where intensity is equal to the first reference intensity in the first auto-correlation function and by fitting a second aberration function to an isointensity line that connects positions where intensity is equal to a second reference intensity in a second auto-correlation function; and processing of controlling an electron optical system based on the aberration coefficient.
Inventors:
Shigeyuki Morishita
Chiyo
Chiyo
Application Number:
JP2019015595A
Publication Date:
August 04, 2021
Filing Date:
January 31, 2019
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01J37/22; H01J37/153
Domestic Patent References:
| JP2009218079A |
Foreign References:
| US5300776 |
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Mitsue Obuchi