SCANNING-TYPE NEAR-FIELD INTERATOMIC FORCE MICROSCOPE, PROBE USED IN THE MICROSCOPE, AND MANUFACTURE OF THE PROBE

Japanese Patent JP2704601

B2

PURPOSE: To obtain a probe for a scanning-type near-field interatomic force microscope which is easy to manufacture and has a good reproducibility of shape, by using a light transmissible medium having a through-hole at an end part thereof to pass light, and forming the through-hole part to be a sharp acute end.
CONSTITUTION: An optical fiber 1 as a light transmissible body consists of a core part 2 propagating light and a clad part 3 of a different index of refraction. A sharpened front end of the optical fiber 1 is formed like a hook. The hook-like part of a sharpened probe 4 is mechanically ground to form a light- reflecting surface 5. A light-reflecting body is set at a rear side of the probe 4 when seen from the front end of the probe 4. Another spring element is not used in this probe, but the resilience of the light transmissible body itself is utilized as a spring element. Therefore, the probe 4 is simplified in structure, with reduced irregularities of characteristics which would result from irregularities of a mounting state of the probe to another spring element, thereby properties, e.g. resonant frequency, Q value and the like are uniformized.

Hiroshi Muramatsu
Chiba Tokuo
Ryuaki Ataka
Fujimichi Masamichi

JP5224894A

January 26, 1998

March 23, 1994

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Seiko Instruments Co., Ltd.

G01B7/34; G01B11/14; G01B11/30; G01B11/24; G01N37/00; G01Q60/06; G01Q60/18; G01Q60/22; G01Q60/38; G01Q70/10; G02B6/24; G02B21/00; H01J37/28; (IPC1-7): G01B11/30; H01J37/28

JP5141961A
JP490152A
JP599641A
JP5173076A
JP5181064A
JP7128039A
JP2189142A
JP9502018A

Keinosuke Hayashi (1 person outside)

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