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Title:
SEALING STRUCTURE
Document Type and Number:
Japanese Patent JP2009144735
Kind Code:
A
Abstract:

To prevent a seal-ring 3 from being damaged or causing dust by a plasma within a sealed space S or corrosive fluid, or from being broken by excessive compression.

A sealing structure comprises a dovetail seal attaching groove 12, the seal-ring 3 in which side surface expansion sections 3a, 3b are held within this seal attaching groove 12, and a head section 3d consists of rubber-like elastic material projected from the seal attaching groove 12, and a spacer 4 which is held in the seal attaching groove 12 and located at sealed space S side, and consists of a material greater in durability than the seal-ring 3. Furthermore, the spacer 4 comprises a collar section 41 supported on a groove shoulder 124 of the sealed space S side of the seal attaching groove 12, and a groove inner-side inserting section 42 fitted in an inner-side surface 122 of the seal attaching groove 12 and pushing the side surface expansion section 3b of the seal-ring 3 to an inner-side surface 123 of the groove shoulder 125 on the side opposite to the sealed space and a shoulder section 43 between the collar section 41 and the groove inner-side inserting section 42. Additionally, the thickness t of the collar section 41 is smaller than a projection height h1 from the seal attaching groove 12 of the seal-ring 3 when non-compressing.


Inventors:
ISHIGAKI YOSHIYUKI
Application Number:
JP2007319476A
Publication Date:
July 02, 2009
Filing Date:
December 11, 2007
Export Citation:
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Assignee:
NOK CORP
International Classes:
F16J15/10
Domestic Patent References:
JP2007173420A2007-07-05
JP2007100900A2007-04-19
JP2006153169A2006-06-15
JP2007187289A2007-07-26
JPH1187320A1999-03-30
JP2005164027A2005-06-23
JPH0438781A1992-02-07
JPH01193463A1989-08-03
Attorney, Agent or Firm:
Yoichi Nomoto



 
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