SEMICONDUCTOR ACCELERATION SENSOR - MATSUSHITA ELECTRIC WORKS LTD

Title:

SEMICONDUCTOR ACCELERATION SENSOR

Document Type and Number:

Japanese Patent JP2001337104

Kind Code:

A

Abstract:

To make a temperature characteristic relating to the detection of acceleration hard to deteriorate.

This semiconductor acceleration sensor includes an acceleration sensor chip 1 having a beam-shaped deflecting part 12 extended therefrom, with a weight part 13 supported against the end of the deflecting part 12 by integral molding, the weight part being displaced by acceleration; a first cap 2 joined to one face of the acceleration sensor chip 1 in such a manner as to face the weight part 12; and a second cap 3 having a joining face 32 joined to the other face of the acceleration sensor chip 1 in such a manner as to face the weight part 13 from the side opposite to the first cap 2, with the second cap being supported on a base. The second cap 3 is so formed that a recessed stress-relieving part 33 for relieving stress is provided on the joining face 32 thereof.

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Inventors:

ISHIDA TAKUO
KAMI HIRONORI
SAITO HIROSHI
AKAI SUMIO
KATAOKA KAZUSHI
SAIJO TAKASHI
SAITO MAKOTO

Application Number:

JP2000157336A

Publication Date:

December 07, 2001

Filing Date:

May 26, 2000

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC WORKS LTD

International Classes:

G01P15/12; G01P15/08; G01P15/125; H01L29/84; (IPC1-7): G01P15/12; G01P15/08; G01P15/125; H01L29/84

Attorney, Agent or Firm:

Junji Ando (1 person outside)

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