Title:
SEMICONDUCTOR DEVICE HAVING MIRROR SURFACE
Document Type and Number:
Japanese Patent JP2014186136
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a semiconductor device reflecting light by a mirror surface, which hardly generates stray light and includes a lid having a shape with high dimensional accuracy.SOLUTION: A semiconductor device comprises: a case 2 using as a storage part a recess 5 opening upward; a MEMS mirror 3 mounted in the recess 5; and a lid 4 sealing the recess 5. The lid 4 has a substrate 12 formed of glass and the like, and a lower layer 14 including a light-transmissive resin formed on a rear surface of the substrate 12. The MEMS mirror 3 has a mirror surface part 6 and an axis 7. The lower layer 14 has an inclined surface part 16 inclined in a direction opposite to the inclination direction of the mirror surface part 6 with respect to the substrate 12. Consequently, light reflected on a surface of a MEMS mirror 3 side of the lower layer 14 rarely hits the mirror surface part 6, resulting in the rare occurrence of the stray light. In addition, the shape of the lid 4 can be formed with high dimensional accuracy as the lid 4 can be manufactured by integral molding.
Inventors:
TAKAHATA TOSHIHIKO
WADO HIROYUKI
ANDO HIROSHI
WADO HIROYUKI
ANDO HIROSHI
Application Number:
JP2013060323A
Publication Date:
October 02, 2014
Filing Date:
March 22, 2013
Export Citation:
Assignee:
DENSO CORP
International Classes:
G02B26/08; G02B26/10
Attorney, Agent or Firm:
Patent business corporation ゆうあい patent firm